Trimming of silicon ring resonator by electron beam induced compaction
نویسندگان
چکیده
We present a technique to trim the resonance of silicon ring resonators. The cladding oxide is compacted by electron beam bombardment, causing strain in the silicon lattice, which leads to a 5 nm resonance shift.
منابع مشابه
Trimming of silicon ring resonator by electron beam induced compaction and strain.
Silicon is becoming the preferable platform for future integrated components, mostly due to the mature and reliable fabrication capabilities of electronics industry. Nevertheless, even the most advanced fabrication technologies suffer from non-uniformity on wafer scale and on chip scale, causing variations in the critical dimensions of fabricated components. This is an important issue since pho...
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